Simulation software of the different individual processes (P-diffusion, wet and dry etchs, PECVD, contacts and metallization).
Sensitivity analysis of critical parameters in each case.
Experimental confirmation of results, all in sample size 15cm x 15cm.
© National Renewable Energy Centre (CENER) - CENER - CIEMAT Foundation
Ciudad de la Innovación, nº 7 · 31621 Sarriguren (Navarra) · Spain · T + 34 948 25 28 00 · + 34 948 27 07 74 · info@cener.com